This course offers a solid foundation in semiconductor manufacturing, from basic concepts to advanced techniques, providing practical insights into the tools, processes, and technologies driving the industry.
Course tropics include:
- Basic Electronics and Microelectronics: Definitions of essential electronic terms/concepts and introduction to microelectronics and integrated circuits
- Process Nodes: Process nodes and their impact on device performance and cost-
- Device Physics and Transistor Operation: Principles of device operation and transistor functionality
- Crystal Growth and Wafer Preparation: Crystal growth techniques and wafer preparation processes
- Advanced Transistor Technologies: FDSOI, FinFETs, and Gate-All-Around (GAA) transistors and their impact on device performance
- Circuit Design and Layout: Introduction to circuit design, layout techniques, and tools
- Wafer Processing:
-Mask Making and Lithography: Techniques and materials used in mask making and various lithographic methods (DUV, Immersion, EUV)
-Clean Room Environments: Importance of clean rooms in semiconductor manufacturing and contamination issues
-Etching and Cleaning Processes: Plasma and wet etching processes
-Ion Implantation and Diffusion Techniques: Methods for doping and controlling diffusion in semiconductor fabrication
-Deposition Techniques: RTP, CVD, ALD, and ALE techniques and their effect on device performance-
-Electroplating and Sputtering: Metal deposition techniques used in manufacturing
-Packaging and Testing: Techniques such as wire bonding, die stacking, flip chip, and chiplets packaging, semiconductor testing processes
-Metrology and Measurement Tools: Tools and methods used for precision measurement in semiconductor manufacturing
-Semiconductor Industry Ecosystem: The major players in the industry